UPCOMING CONFERENCES & IMA MEETINGS

 

IMA Meeting at 7th European AEC/APC Conference
Centre de Congrès, Aix-en-Provence, France

March 31, 2006
2:00 to 6:00 PM

IMA Meeting Agenda

• Introduction and IMA background, John Pace (Si Automation)
• Standards Update, James Moyne (University of Michigan)
• Vacuum Pump Energy Savings Using the New SensorBus Standard for Idle Mode, Brad van Eck (SEMATECH)
• IMA first review of Factory Integration Section of ITRS, James Moyne (University of Michigan)
• Factory Integration Activities at NIST, John Messina (NIST)
• Multiple Sensor Applications - Enhancing Tool Data in State of the Art MVA Technology, Stela Diamant (MKS Instruments)
• Industrial Experience of Integrated Metrology at Crolles2 Fab, Alain Ostrovsky (STMicroelectronic) and Joost Van Herk (Philips)
• Update on the EU IMTF Activities: Standardization of Integrated Ellipsometry, Martin Schellenberger (Fraunhofer Institute)