IMA Meeting at
AEC/APC Symposium XVII
Indian Wells, California
September 29, 2005

IMA Meeting Agenda
at
AEC/APC Symposium XVII

Agenda:

7:30 - 8:00 Registration
8:00 - 8:15 Introduction, John Pace
8:15 - 8:45 Standards Activity Review, James Moyne
8:45 - 9:30 Achieving Energy Savings at Fabs by Leveraging SEMI Standards to Implement a Pump ‘Idle” State – Richard Gwizdak, Canton Control Solutions and Tom Russell, BOC Edwards
9:30 - 10:00 IMA Survey, John Curry
10:00 - 10:15 Break
10:15 - 11:00 The Pattern Metrology Puzzle: Piecing Together a Control Strategy for 65-nm and Beyond - Kevin Lensing, AMD
11:00 – 11:30 ITRS Update, Brad Van Eck, ISMI
11:30 - 12:00 Open discussion, IMA Future Direction

Presentations:

IMA Introduction

IMA Standards Update

Vacuum Pump Presentation

IMA Survey Results

Pattern Metrology Presentation