IMA WORKSHOP
ON INTEGRATED MEASUREMENTS AND
PIGGY-BACK CONTROLLERS
AGENDA IMA Meeting
Doubletree Hotel, San Jose
June 24, 1998

7:30 Arrive/Continental Breakfast

8:00 IMA Workshop: Near Term Solutions for Advanced Equipment Control and Advanced Process Control using a PiggyBack Controller or SCADA

8:00 - 8:10 Introduction and Agenda P. R. Solomon

8:10 – 8:30 Pat Gabella – Summary of Data Access Needs

8:30 - 10:30 PiggyBack Controller with Integrated Metrology, Run-to-Run Control and Fault Detection and Classification Panel On what is Needed in the Near Term

8:30 - 9:45 Panel member coments on issues

John Pace (IBM), Jean-Yves Bancilhon (Applied), Wim Aarts (Wacker ), Joe Bendik (National Semiconductor), Tom Larson (KLA-Tencor), Farro Kaveh (LAM), TI, Merritt Funk (Tokyo Electron), Volker Tegeder (Siemens)

What are the needs What is the value

What are the barriers to implementation

What is the model for providing integrated metrology

What standards are needed

Fabrication Tool Interface

How To Do Mapping

9:45 - 10:30 Open Discussion to Discus the Top Four Issues

10:30 – 10:45 Break

10:45 – 12:45 What is Available

10:45 - 12:00 Pannel member comments on issues

Peter Rosenthal (On-Line -Value of Benefits), Moshe Finarov (Nova - CMP), James Moyne (Mitex - CMP), Mike Whelan (Verity - Etch Sensors), Talat Hasan (Sensys -CMP), John Hanselman (AIS - PVD, CVD, ECD), Bill Shade (HighYield -Particles), Steve Lakeman (Leybold Inficon - Etch, In-Situ), Jack Ghiselli (GW – Communication) Technology Status

Measuring Benefits

How to Deliver the Technology

Barriers and Solutions

Near Term vs. Long Term

12:00 – 12:45 Open Discussion -

How do the sensor suppliers fit the needs

12:45 - 1:15 Summary of Needs (Hanselman, Hasan)

1:15 - 2:15 Lunch

2:15 - 3:15 IMA Business Meeting

3:15 Meeting Adjourned