Integrated Measurement Meeting
July 14, 1999
2:00 to 7:00
Palace Hotel
2 New Montgomery Street
San Francisco, California
Tel: 415-512-1111

2:00-2:30 Business Meeting

2:30-3:00 Matt Hankinson -National Semiconductor - NIST ATP Program for Intelligent Control of Semiconductor Patterning Processes

3:00-3:45 Wim Aarts - Wacker Siltornic - Implementing Integrated Metrology and Run-to-Run Control for Epi Manufacturing

3:45-4:15 John Pace - IBM - Advanced Process Control at IBM

4:15-5:00 Charles Weber - MIT - Strategic options for users and suppliers of APC technology

5:00-5:30 Discussion of APC Progress and Business Models

5:30-7:00 Reception - Sponsored by Leybold Inficon, MKS, Verity and On-Line Technologies